Designer and manufacturer of solid state temperature control systems intended to control process temperatures during semiconductor manufacturing. The company's systems utilize thermoelectric heating and cooling to provide dynamic temperature control and are used in plasma etch, wet etch, and photoresist processes.
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|Publication ID||Patent Title||Status||First Filing Date||Technology (CPC)||Citations|
|US-5640852-A||For adjusting the temperature of a stream of liquid||Inactive||06-Oct-1995||000000000|
|Name||Title||Board Seat||Contact Info|
|Robert Higgins||Founder & Chief Executive Officer|