SensArray (Commercial Products) Overview

  • Status
  • Acquired/​Merged
  • Latest Deal Type
  • M&A
  • Financing Rounds
  • 1

SensArray (Commercial Products) General Information


Manufacturer of lithography and plasma etch products. The company's lithography and plasma etch products includes SensorWafers tools which measures wafer-level process conditions in technologies as diverse as plasma etch, litho/track cells, wet processes, CVD, PVD, CMP and RTP to capture high-precision, time-sequence temperature and plasma data from the fast-changing etch environment, enabling semiconductor industries to avail quality lithography and plasma etch products.

Contact Information

Ownership Status
Financing Status
Corporate Backed or Acquired
Primary Industry
Other Commercial Products
Primary Office
  • 5451 Patrick Henry Drive
  • Santa Clara, CA 95054
  • United States
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SensArray (Commercial Products) Valuation & Funding

Deal Type Date Amount Valuation/
Post-Val Status Debt

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SensArray (Commercial Products) Executive Team (1)

Name Title Board Seat Contact Info
Wayne Renken President
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